NeurIPS 2025 Papers

Conference on Neural Information Processing Systems

Decision breakdown

5,812papers

Counted from the official paper list; may differ slightly from the number the conference announced.

  • Oral
    931.6%
  • Spotlight
    73912.7%
  • Poster
    4,98085.7%

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DynaPipe: Dynamic Layer Redistribution for Efficient Serving of LLMs with Pipeline Parallelism

HongXin Xu, Tianyu Guo, Xianwei Zhang

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To accelerate large language model (LLM) inference, pipeline parallelism partitions model layers into sequential stages, each assigned to a different device for concurrent execution. However, this method often suffers from pipeline bubbles caused by imbalanced computation in the tail stage. While upstream stages focus solely on layer-forward operations, the final stage must also handle post-processing tasks like sampling, introducing significant latency. This uneven workload leads to pipeline misalignment, forcing upstream stages to idle and degrading overall performance. Existing frameworks typically distribute layers evenly across stages without accounting for computational load differences. To address this, we propose DynaPipe, a dynamic layer redistribution scheme that adaptively balances computation by predicting execution latency in real time. Moreover, we introduce an asynchronous key-value (KV) cache migration coordinator to enable non-blocking layer redistribution during inference. Experiments on representative LLMs demonstrate that DynaPipe reduces average end-to-end request latency by 8% to 49% across diverse workloads, outperforming state-of-the-art pipeline parallelism systems.

Poster
AdaSTaR: Adaptive Data Sampling for Training Self-Taught Reasoners

Woosung Koh, Wonbeen Oh, Jaein Jang, MinHyung Lee, Hyeongjin Kim, Ah Yeon Kim, Joonkee Kim, Junghyun Lee, Taehyeon Kim, Se-Young Yun

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Self-Taught Reasoners (STaR), synonymously known as Rejection sampling Fine-Tuning (RFT), is an integral part of the training pipeline of self-improving reasoning Language Models (LMs). The self-improving mechanism often employs random observation (data) sampling. However, this results in trained observation imbalance; inefficiently over-training on solved examples while under-training on challenging ones. In response, we introduce Adaptive STaR (AdaSTaR), a novel algorithm that rectifies this by integrating two adaptive sampling principles: (1) Adaptive Sampling for Diversity: promoting balanced training across observations, and (2) Adaptive Sampling for Curriculum: dynamically adjusting data difficulty to match the model's evolving strength. Across six benchmarks, AdaSTaR achieves best test accuracy in all instances (6/6) and reduces training FLOPs by an average of 58.6\% against an extensive list of baselines. These improvements in performance and efficiency generalize to different pre-trained LMs and larger models, paving the way for more efficient and effective self-improving LMs.

Poster
Exploiting LLMs for Automatic Hypothesis Assessment via a Logit-Based Calibrated Prior

Yue Gong, Raul Castro Fernandez

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As hypothesis generation becomes increasingly automated, a new bottleneck has emerged: hypothesis assessment. Modern systems can surface thousands of statistical relationships—correlations, trends, causal links—but offer little guidance on which ones are novel, non-trivial, or worthy of expert attention. In this work, we study the complementary problem to hypothesis generation: automatic hypothesis assessment. Specifically, we ask—given a large set of statistical relationships, can we automatically assess which ones are novel and worth further exploration? We focus on correlations as they are a common entry point in exploratory data analysis that often serve as the basis for forming deeper scientific or causal hypotheses. To support automatic assessment, we propose to leverage the vast knowledge encoded in LLMs' weights to derive a prior distribution over the correlation value of a variable pair. If an LLM's prior expects the correlation value observed, then such correlation is not surprising, and vice versa. We propose the Logit-based Calibrated Prior, an LLM-elicited correlation prior that transforms the model’s raw output logits into a calibrated, continuous predictive distribution over correlation values. We evaluate the prior on a benchmark of 2,096 real-world variable pairs and it achieves a sign accuracy of 78.8%, a mean absolute error of 0.26, and 95% credible interval coverage of 89.2% in predicting Pearson correlation coefficient. It also outperforms a fine-tuned RoBERTa classifier in binary correlation prediction and achieves higher precision@K in hypothesis ranking. We further show that the prior generalizes to correlations not seen during LLM pretraining, reflecting context-sensitive reasoning rather than memorization.

Poster
DynaNav: Dynamic Feature and Layer Selection for Efficient Visual Navigation

Jiahui Wang, Changhao Chen

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Visual navigation is essential for robotics and embodied AI. However, existing foundation models, particularly those with transformer decoders, suffer from high computational overhead and lack interpretability, limiting their deployment on edge devices. To address this, we propose DynaNav, a Dynamic Visual Navigation framework that adapts feature and layer selection based on scene complexity. It employs a trainable hard feature selector for sparse operations, enhancing efficiency and interpretability. Additionally, we integrate feature selection into an early-exit mechanism, with Bayesian Optimization determining optimal exit thresholds to reduce computational cost. Extensive experiments in real-world-based datasets and simulated environments demonstrate the effectiveness of DynaNav. Compared to ViNT, DynaNav achieves a $2.6\times$ reduction in FLOPs, 42.3% lower inference time, and 32.8% lower memory usage while improving navigation performance across four public datasets.

Poster
NeurIPT: Foundation Model for Neural Interfaces

Zitao Fang, Chenxuan Li, Zhou Hongting, Shuyang Yu, Guodong Du, Ashwaq Qasem, Yang Lu, Jing Li, Junsong Zhang, Sim Kuan Goh

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Electroencephalography (EEG) has wide-ranging applications, from clinical diagnosis to brain-computer interfaces (BCIs). With the increasing volume and variety of EEG data, there has been growing interest in establishing foundation models (FMs) to scale up and generalize neural decoding. Despite showing early potential, applying FMs to EEG remains challenging due to substantial inter-subject, inter-task, and inter-condition variability, as well as diverse electrode configurations across recording setups. To tackle these open challenges, we propose **NeurIPT**, a foundation model tailored for diverse EEG-based **Neur**al **I**nterfaces with a **P**re-trained **T**ransformer by capturing both homogeneous and heterogeneous spatio-temporal characteristics inherent in EEG signals. Temporally, we introduce Amplitude-Aware Masked Pretraining (AAMP), masking based on signal amplitude rather than random intervals, to learn robust representations across varying signal intensities beyond local interpolation. Moreover, this temporal representation is enhanced by a progressive Mixture-of-Experts (MoE) architecture, where specialized expert subnetworks are progressively introduced at deeper layers, adapting effectively to the diverse temporal characteristics of EEG signals. Spatially, NeurIPT leverages the 3D physical coordinates of electrodes, enabling effective transfer across varying EEG settings, and develops Intra-Inter Lobe Pooling (IILP) during fine-tuning to efficiently exploit regional brain features. Empirical evaluations across nine downstream BCI datasets, via fine-tuning and training from scratch, demonstrated NeurIPT consistently achieved state-of-the-art performance, highlighting its broad applicability and robust generalization. Our work pushes forward the state of FMs in EEG and offers insights into scalable and generalizable neural information processing systems.

Poster
Constructing an Optimal Behavior Basis for the Option Keyboard

Lucas N. Alegre, Ana L. C. Bazzan, Andre Barreto, Bruno Castro da Silva

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Multi-task reinforcement learning aims to quickly identify solutions for new tasks with minimal or no additional interaction with the environment. Generalized Policy Improvement (GPI) addresses this by combining a set of base policies to produce a new one that is at least as good—though not necessarily optimal—as any individual base policy. Optimality can be ensured, particularly in the linear-reward case, via techniques that compute a Convex Coverage Set (CCS). However, these are computationally expensive and do not scale to complex domains. The Option Keyboard (OK) improves upon GPI by producing policies that are at least as good—and often better. It achieves this through a learned meta-policy that dynamically combines base policies. However, its performance critically depends on the choice of base policies. This raises a key question: is there an optimal set of base policies—an optimal *behavior basis*—that enables zero-shot identification of optimal solutions for *any* linear tasks? We solve this open problem by introducing a novel method that efficiently constructs such an optimal behavior basis. We show that it significantly reduces the number of base policies needed to ensure optimality in new tasks. We also prove that it is strictly more expressive than a CCS, enabling particular classes of *non-linear* tasks to be solved optimally. We empirically evaluate our technique in challenging domains and show that it outperforms state-of-the-art approaches, increasingly so as task complexity increases.

Poster
Styl3R: Instant 3D Stylized Reconstruction for Arbitrary Scenes and Styles

Peng Wang, Xiang Liu, Peidong Liu

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Stylizing 3D scenes instantly while maintaining multi-view consistency and faithfully resembling a style image remains a significant challenge. Current state-of-the-art 3D stylization methods typically involve computationally intensive test-time optimization to transfer artistic features into a pretrained 3D representation, often requiring dense posed input images. In contrast, leveraging recent advances in feed-forward reconstruction models, we demonstrate a novel approach to achieve direct 3D stylization in less than a second using unposed sparse-view scene images and an arbitrary style image. To address the inherent decoupling between reconstruction and stylization, we introduce a branched architecture that separates structure modeling and appearance shading, effectively preventing stylistic transfer from distorting the underlying 3D scene structure. Furthermore, we adapt an identity loss to facilitate pre-training our stylization model through the novel view synthesis task. This strategy also allows our model to retain its original reconstruction capabilities while being fine-tuned for stylization. Comprehensive evaluations, using both in-domain and out-of-domain datasets, demonstrate that our approach produces high-quality stylized 3D content that achieve a superior blend of style and scene appearance, while also outperforming existing methods in terms of multi-view consistency and efficiency.

Poster
Cooperative Retrieval-Augmented Generation for Question Answering: Mutual Information Exchange and Ranking by Contrasting Layers

Youmin Ko, Sung Jong Seo, Hyunjoon Kim

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Since large language models (LLMs) have a tendency to generate factually inaccurate output, retrieval-augmented generation (RAG) has gained significant attention as a key means to mitigate this downside of harnessing only LLMs. However, existing RAG methods for simple and multi-hop question answering (QA) are still prone to incorrect retrievals and hallucinations. To address these limitations, we propose CoopRAG, a novel RAG framework for the question answering task in which a retriever and an LLM work cooperatively with each other by exchanging informative knowledge, and the earlier and later layers of the retriever model work cooperatively with each other to accurately rank the retrieved documents relevant to a given query. In this framework, we (i) unroll a question into sub-questions and a reasoning chain in which uncertain positions are masked, (ii) retrieve the documents relevant to the question augmented with the sub-questions and the reasoning chain, (iii) rerank the documents by contrasting layers of the retriever, and (iv) reconstruct the reasoning chain by filling the masked positions via the LLM. Our experiments demonstrate that CoopRAG consistently outperforms state-of-the-art QA methods on three multi-hop QA datasets as well as a simple QA dataset in terms of both the retrieval and QA performances. Our code is available.

Poster
The Indra Representation Hypothesis

Jianglin Lu, Hailing Wang, Kuo Yang, Yitian Zhang, Simon Jenni, Yun Fu

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Recent studies have uncovered an interesting phenomenon: unimodal foundation models tend to learn convergent representations, regardless of differences in architecture, training objectives, or data modalities. However, these representations are essentially internal abstractions of samples that characterize samples independently, leading to limited expressiveness. In this paper, we propose The Indra Representation Hypothesis, inspired by the philosophical metaphor of Indra’s Net. We argue that representations from unimodal foundation models are converging to implicitly reflect a shared relational structure underlying reality, akin to the relational ontology of Indra’s Net. We formalize this hypothesis using the V-enriched Yoneda embedding from category theory, defining the Indra representation as a relational profile of each sample with respect to others. This formulation is shown to be unique, complete, and structure-preserving under a given cost function. We instantiate the Indra representation using angular distance and evaluate it in cross-model and cross-modal scenarios involving vision, language, and audio. Extensive experiments demonstrate that Indra representations consistently enhance robustness and alignment across architectures and modalities, providing a theoretically grounded and practical framework for training-free alignment of unimodal foundation models. Our code is available at https://github.com/Jianglin954/Indra.

Poster
ExPO: Unlocking Hard Reasoning with Self-Explanation-Guided Reinforcement Learning

Ruiyang Zhou, Shuozhe Li, Amy Zhang, Liu Leqi

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Recent advances in large language models have been driven by reinforcement learning (RL)-style post-training, which improves reasoning by optimizing model outputs based on reward or preference signals. GRPO-style approaches implement this by using self-generated samples labeled by an outcome-based verifier. However, these methods depend heavily on the model’s initial ability to produce positive samples. They primarily refine what the model already knows (distribution sharpening) rather than enabling the model to solve problems where it initially fails. This limitation is especially problematic in early-stage RL training and on challenging reasoning tasks, where positive samples are unlikely to be generated. To unlock reasoning ability in such settings, the model must explore new reasoning trajectories beyond its current output distribution. Such exploration requires access to sufficiently good positive samples to guide the learning. While expert demonstrations seem like a natural solution, we find that they are often ineffective in RL post-training. Instead, we identify two key properties of effective positive samples: they should (1) be likely under the current policy, and (2) increase the model’s likelihood of predicting the correct answer. Based on these insights, we propose \textbf{Self-Explanation Policy Optimization (ExPO)}—a simple and modular framework that generates such samples by conditioning on the ground-truth answer. ExPO enables efficient exploration and guides the model to produce reasoning trajectories more aligned with its policy than expert-written CoTs, while ensuring higher quality than its own (incorrect) samples. Experiments show that ExPO improves both learning efficiency and final performance on reasoning benchmarks, surpassing expert-demonstration-based methods in challenging settings such as MATH level-5, where the model initially struggles the most.

Poster
ReAgent-V: A Reward-Driven Multi-Agent Framework for Video Understanding

Yiyang Zhou, Yangfan He, Yaofeng Su, Siwei Han, Joel Jang, Gedas Bertasius, Mohit Bansal, Huaxiu Yao

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Video understanding is fundamental to tasks such as action recognition, video reasoning, and robotic control. Early video understanding methods based on large vision-language models (LVLMs) typically adopt a single-pass reasoning paradigm without dynamic feedback, limiting the model’s capacity to self-correct and adapt in complex scenarios. Recent efforts have attempted to address this limitation by incorporating reward models and reinforcement learning to enhance reasoning, or by employing tool-agent frameworks. However, these approaches face several challenges, including high annotation costs, reward signals that fail to capture real-time reasoning states, and low inference efficiency. To overcome these issues, we propose ReAgent-V, a novel agentic video understanding framework that integrates efficient frame selection with real-time reward generation during inference. These reward signals not only guide iterative answer refinement through a multi-perspective reflection mechanism—adjusting predictions from conservative, neutral, and aggressive viewpoints—but also enable automatic filtering of high-quality data for supervised fine-tuning (SFT), direct preference optimization (DPO), and group relative policy optimization (GRPO). ReAgent-V is lightweight, modular, and extensible, supporting flexible tool integration tailored to diverse tasks. Extensive experiments on 12 datasets across three core applications—video understanding, video reasoning enhancement, and vision-language-action model alignment—demonstrate significant gains in generalization and reasoning, with improvements of up to 6.9%, 2.1%, and 9.8%, respectively, highlighting the effectiveness and versatility of the proposed framework.

Poster
Robust LLM Alignment via Distributionally Robust Direct Preference Optimization

Zaiyan Xu, Sushil Vemuri, Kishan Panaganti, Dileep Kalathil, Rahul Jain, Deepak Ramachandran

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A major challenge in aligning large language models (LLMs) with human preferences is the issue of distribution shift. LLM alignment algorithms rely on static preference datasets, assuming that they accurately represent real-world user preferences. However, user preferences vary significantly across geographical regions, demographics, linguistic patterns, and evolving cultural trends. This preference distribution shift leads to catastrophic alignment failures in many real-world applications. We address this problem using the principled framework of distributionally robust optimization, and develop two novel distributionally robust direct preference optimization (DPO) algorithms, namely, Wasserstein DPO (WDPO) and Kullback–Leibler DPO (KLDPO). We characterize the sample complexity of learning the optimal policy parameters for WDPO and KLDPO. Moreover, we propose scalable gradient descent-style learning algorithms by developing suitable approximations for the challenging minimax loss functions of WDPO and KLDPO. Our empirical experiments using benchmark data sets and LLMs demonstrate the superior performance of WDPO and KLDPO in substantially improving the alignment when there is a preference distribution shift.

Poster
Video Perception Models for 3D Scene Synthesis

Rui Huang, Guangyao Zhai, Zuria Bauer, Marc Pollefeys, Federico Tombari, Leonidas Guibas, Gao Huang, Francis Engelmann

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Automating the expert-dependent and labor-intensive task of 3D scene synthesis would significantly benefit fields such as architectural design, robotics simulation, and virtual reality. Recent approaches to 3D scene synthesis often rely on the commonsense reasoning of large language models (LLMs) or strong visual priors from image generation models. However, current LLMs exhibit limited 3D spatial reasoning, undermining the realism and global coherence of synthesized scenes, while image-generation-based methods often constrain viewpoint control and introduce multi-view inconsistencies. In this work, we present Video Perception models for 3D Scene synthesis (VIPScene), a novel framework that exploits the encoded commonsense knowledge of the 3D physical world in video generation models to ensure coherent scene layouts and consistent object placements across views. VIPScene accepts both text and image prompts and seamlessly integrates video generation, feedforward 3D reconstruction, and open-vocabulary perception models to semantically and geometrically analyze each object in a scene. This enables flexible scene synthesis with high realism and structural consistency. For a more sufficient evaluation on coherence and plausibility, we further introduce First-Person View Score (FPVScore), utilizing a continuous first-person perspective to capitalize on the reasoning ability of multimodal large language models. Extensive experiments show that VIPScene significantly outperforms existing methods and generalizes well across diverse scenarios.

Poster
RGB-to-Polarization Estimation: A New Task and Benchmark Study

Beibei Lin, Zifeng Yuan, Tingting Chen

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Polarization images provide rich physical information that is fundamentally absent from standard RGB images, benefiting a wide range of computer vision applications such as reflection separation and material classification. However, the acquisition of polarization images typically requires additional optical components, which increases both the cost and the complexity of the applications. To bridge this gap, we introduce a new task: RGB-to-polarization image estimation, which aims to infer polarization information directly from RGB images. In this work, we establish the first comprehensive benchmark for this task by leveraging existing polarization datasets and evaluating a diverse set of state-of-the-art deep learning models, including both restoration-oriented and generative architectures. Through extensive quantitative and qualitative analysis, our benchmark not only establishes the current performance ceiling of RGB-to-polarization estimation, but also systematically reveals the respective strengths and limitations of different model families — such as direct reconstruction versus generative synthesis, and task-specific training versus large-scale pre-training. In addition, we provide some potential directions for future research on polarization estimation. This benchmark is intended to serve as a foundational resource to facilitate the design and evaluation of future methods for polarization estimation from standard RGB inputs.

Poster
ParamMute: Suppressing Knowledge-Critical FFNs for Faithful Retrieval-Augmented Generation

Pengcheng Huang, Zhenghao Liu, Yukun Yan, Haiyan Zhao, Xiaoyuan Yi, Hao Chen, Zhiyuan Liu, Maosong Sun, Tong Xiao, Ge Yu, Chenyan Xiong

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Large language models (LLMs) integrated with retrieval-augmented generation (RAG) have improved factuality by grounding outputs in external evidence. However, they remain susceptible to unfaithful generation, where outputs contradict retrieved context despite its relevance and accuracy. Existing approaches aiming to improve faithfulness primarily focus on enhancing the utilization of external context, but often overlook the persistent influence of internal parametric knowledge during generation. In this work, we investigate the internal mechanisms behind unfaithful generation and identify a subset of mid-to-deep feed-forward networks (FFNs) that are disproportionately activated in such cases. Building on this insight, we propose Parametric Knowledge Muting through FFN Suppression (ParamMute), a framework that improves contextual faithfulness by suppressing the activation of unfaithfulness-associated FFNs and calibrating the model toward retrieved knowledge. To evaluate our approach, we introduce CoFaithfulQA, a benchmark specifically designed to evaluate faithfulness in scenarios where internal knowledge conflicts with accurate external evidence. Experimental results show that ParamMute significantly enhances faithfulness across both CoFaithfulQA and the established ConFiQA benchmark, achieving substantial reductions in reliance on parametric memory. These findings underscore the importance of mitigating internal knowledge dominance and provide a new direction for improving LLM trustworthiness in RAG. All codes are available at https://github.com/OpenBMB/ParamMute.

Poster
Learn and Ensemble Bridge Adapters for Multi-domain Task Incremental Learning

Ziqi Gu, Chunyan Xu, Wenxuan Fang, Xin Liu, Yide Qiu, Zhen Cui

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Multi-domain task incremental learning (MTIL) demands models to master domain-specific expertise while preserving generalization capabilities. Inspired by human lifelong learning, which relies on revisiting, aligning, and integrating past experiences, we propose a Learning and Ensembling Bridge Adapters (LEBA) framework. To facilitate cohesive knowledge transfer across domains, specifically, we propose a continuous-domain bridge adaptation module, leveraging the distribution transfer capabilities of Schrödinger bridge for stable progressive learning. To strengthen memory consolidation, we further propose a progressive knowledge ensemble strategy that revisits past task representations via a diffusion model and dynamically integrates historical adapters. For efficiency, LEBA maintains a compact adapter pool through similarity-based selection and employs learnable weights to align replayed samples with current task semantics. Together, these components effectively mitigate catastrophic forgetting and enhance generalization across tasks. Extensive experiments across multiple benchmarks validate the effectiveness and superiority of LEBA over state-of-the-art methods.

Poster
MAGNET: A Multi-agent Framework for Finding Audio-Visual Needles by Reasoning over Multi-Video Haystacks

Sanjoy Chowdhury, Mohamed Elmoghany, Yohan Abeysinghe, Junjie Fei, Sayan Nag, Salman Khan, Mohamed Elhoseiny, Dinesh Manocha

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Large multimodal models (LMMs) have shown remarkable progress in audiovisual understanding, yet they struggle with real-world scenarios that require complex reasoning across extensive video collections. Existing benchmarks for video question answering remain limited in scope, typically involving one clip per query, which falls short of representing the challenges of large-scale, audiovisual retrieval and reasoning encountered in practical applications. To bridge this gap, we introduce a novel task named AVHaystacksQA, where the goal is to identify salient segments across different videos in response to a query and link them together to generate the most informative answer. To this end, we present AVHaystacks, an audio-visual benchmark comprising 3100 annotated QA pairs designed to assess the capabilities of LMMs in multi-video retrieval and temporal grounding task. Additionally, we propose a model-agnostic, multi-agent framework MAGNET to address this challenge, achieving up to 89% and 65% relative improvements over baseline methods on BLEU@4 and GPT evaluation scores in QA task on our proposed AVHaystacks. To enable robust evaluation of multi-video retrieval and temporal grounding for optimal response generation, we introduce two new metrics, STEM, which captures alignment errors between a ground truth and a predicted step sequence and MTGS, to facilitate balanced and interpretable evaluation of segment-level grounding performance.

Poster
Learning Pattern-Specific Experts for Time Series Forecasting Under Patch-level Distribution Shift

Yanru Sun, Zongxia Xie, Emadeldeen Eldele, Dongyue Chen, Qinghua Hu, Min Wu

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Time series forecasting, which aims to predict future values based on historical data, has garnered significant attention due to its broad range of applications. However, real-world time series often exhibit heterogeneous pattern evolution across segments, such as seasonal variations, regime changes, or contextual shifts, making accurate forecasting challenging. Existing approaches, which typically train a single model to capture all these diverse patterns, often struggle with the pattern drifts between patches and may lead to poor generalization. To address these challenges, we propose TFPS, a novel architecture that leverages pattern-specific experts for more accurate and adaptable time series forecasting. TFPS employs a dual-domain encoder to capture both time-domain and frequency-domain features, enabling a more comprehensive understanding of temporal dynamics. It then performs subspace clustering to dynamically identify distinct patterns across data segments. Finally, these patterns are modeled by specialized experts, allowing the model to learn multiple predictive functions. Extensive experiments on real-world datasets demonstrate that TFPS outperforms state-of-the-art methods, particularly on datasets exhibiting significant distribution shifts. The data and code are available: https://github.com/syrGitHub/TFPS.

Poster
LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing

Hongquan He, Zhen Wang, Jingya Wang, Tao Wu, Xuming He, Bei Yu, Jingyi Yu, Hao GENG

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Lithography orchestrates a symphony of light, mask and photochemicals to transfer the integrated circuit patterns onto the wafer. Lithography simulation serves as the critical nexus between circuit design and manufacturing, where its speed and accuracy fundamentally govern the optimization quality of downstream resolution enhancement techniques (RET). While machine learning promises to circumvent computational limitations of lithography process through data-driven or physics-informed approximations of computational lithography, existing simulators suffer from inadequate lithographic awareness due to insufficient training data capturing essential process variations and mask correction rules. We present LithoSim, the most comprehensive lithography simulation benchmark to date, featuring over $4$ million high-resolution input-output pairs with rigorous physical correspondence. The dataset systematically incorporates alterable optical source distributions, metal and via mask topologies with optical proximity correction (OPC) variants, and process windows reflecting fab-realistic variations. By integrating domain-specific metrics spanning AI performance and lithographic fidelity, LithoSim establishes a unified evaluation framework for data-driven and physics-informed computational lithography. The data (https://huggingface.co/datasets/grandiflorum/LithoSim), code (https://dw-hongquan.github.io/LithoSim), and pre-trained models (https://huggingface.co/grandiflorum/LithoSim) are released openly to support the development of hybrid ML-based and high-fidelity lithography simulation for the benefit of semiconductor manufacturing.

Poster
Pessimistic Data Integration for Policy Evaluation

Xiangkun Wu, Ting Li, Gholamali Aminian, Armin Behnamnia, Hamid R. Rabiee, Chengchun Shi

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This paper studies how to integrate historical control data with experimental data to enhance A/B testing, while addressing the distributional shift between historical and experimental datasets. We propose a pessimistic data integration method that combines two causal effect estimators constructed based on experimental and historical datasets. Our main idea is to conceptualize the weight function for this combination as a policy so that existing pessimistic policy learning algorithms are applicable to learn the optimal weight that minimizes the resulting weighted estimator's mean squared error. Additionally, we conduct comprehensive theoretical and empirical analyses to compare our method against various baseline estimators across five scenarios. Both our theoretical and numerical findings demonstrate that the proposed estimator achieves near-optimal performance across all scenarios.

Poster